The Investigation of Microstructure, Photocatalysis and Corrosion Resistance of C-Doped Ti–O Films Fabricated by Reactive Magnetron Sputtering Deposition with CO2 Gas

By employing carbon dioxide as one source of reaction gases, carbon-doped Ti–O films were fabricated via reactive magnetron sputtering deposition. The chemical bonding configurations and microstructure the analyzed by Raman spectrum SEM, respectively. effect pH on photocatalytic activities was determined evaluation decolorization rate methyl orange under alkali, acid neutrality conditions using UV light irradiation. Electrochemical impedance spectroscopy potentiodynamic polarization tests employed to determine anti-corrosion properties. Compared with C-free film, C-doped exhibit superior corrosion resistance. Furthermore, results photodegradation experiment suggest that have excellent and, for orange, those higher content hyper-photodegradative alkali condition.